KA

Kengo Ashizawa

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #2,041,649 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8794896 Vacuum processing apparatus and zonal airflow generating unit 2014-08-05
8623457 Vacuum processing system 2014-01-07