Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441225 | Substrate liquid processing apparatus | Satoshi Kaneko | 2022-09-13 |
| 10689762 | Substrate processing apparatus, substrate processing method and recording medium | Akira Murata, Satoshi Kaneko, Kazunori Sakamoto | 2020-06-23 |
| 10584420 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Satoshi Kaneko, Kazunori Sakamoto | 2020-03-10 |
| 10081033 | Heat exchange system, and substrate processing apparatus having same | Satoshi Kaneko | 2018-09-25 |
| 9822453 | Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program | Satoshi Kaneko, Kazunori Sakamoto | 2017-11-21 |