Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368040 | Apparatus for and method of transporting substrates to be processed | Osamu Kuroda, Kazuyuki Honda, Hiroshi Yamahata | 2002-04-09 |
| 6222339 | System and method for controlling attitude of substrate | Shigeru Kimura | 2001-04-24 |
| 6052913 | Positioning device and positioning method | Satoshi Kaneko | 2000-04-25 |