KK

Kanzo Kato

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #1,854,643 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11430704 Substrate processing apparatus, substrate processing method, and storage medium — 2022-08-30
10395998 Substrate processing apparatus, substrate processing method, and storage medium — 2019-08-27