Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082054 | Method of optimizing process recipe of substrate processing system | Kiyoshi Suzuki, Yuichi Takenaga | 2011-12-20 |
| 7738983 | Method of optimizing process recipe of substrate processing system | Kiyoshi Suzuki, Yuichi Takenaga | 2010-06-15 |