Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557476 | Film forming method and film forming apparatus | Satoshi Takagi, Kazuya Kitamura | 2023-01-17 |
| 11211265 | Heat treatment apparatus and heat treatment method | Satoshi Takagi, Hiroyuki Hayashi | 2021-12-28 |
| 10854449 | Method and apparatus for forming silicon film | Satoshi Takagi, Hiroyuki Hayashi | 2020-12-01 |