Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8654190 | Imaging position correction method, imaging method, and substrate imaging apparatus | — | 2014-02-18 |
| 7783102 | Defect detecting apparatus, defect detecting method, information processing apparatus, information processing method, and program therefor | — | 2010-08-24 |
| 7783104 | Defect detecting apparatus, defect detecting method, information processing apparatus, information processing method, and program therefor | — | 2010-08-24 |