HY

Hiroki Yonekawa

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,814,082 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10770284 Substrate processing method and substrate processing apparatus Shuhei Takahashi, Kouzou Tachibana, Hideki Nishimura 2020-09-08