Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521854 | Processing liquid supply system, processing liquid supply apparatus, and carrier storage apparatus | Kazuya Hashimoto | 2022-12-06 |
| 11217468 | Substrate treatment apparatus | — | 2022-01-04 |
| 9915677 | Data acquisition method of substrate processing apparatus and sensing substrate | — | 2018-03-13 |
| 9389242 | Method for obtaining data of substrate processing apparatus and sensor substrate | — | 2016-07-12 |
| 9268739 | Data acquisition method in substrate processing apparatus and sensor substrate | — | 2016-02-23 |