Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694893 | Semiconductor manufacturing parts comprising SiC deposition layer, and manufacturing method therefor | Ki-Won Kim, Jong Hyun Kim | 2023-07-04 |
| 11591227 | SiC material and SiC composite material | — | 2023-02-28 |
| 9956589 | Method for repairing semiconductor processing components | — | 2018-05-01 |
| 8865519 | Method of manufacturing silicon carbide structure | Jae Seok Lim, Mi-Ra Yoon | 2014-10-21 |