Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7221731 | X-ray microscopic inspection apparatus | Keiji Yada, Yasushi Saito | 2007-05-22 |
| 7218703 | X-ray microscopic inspection apparatus | Keiji Yada, Yasushi Saito | 2007-05-15 |
| 6046793 | Proximity printing device with variable irradiation angle | Yoneta Tanaka | 2000-04-04 |
| 6003828 | Means for supporting a mask | Takashi Kawahashi | 1999-12-21 |