Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600465 | Atomic-scale processing method by combining extreme ultraviolet light and plasma | — | 2023-03-07 |
| 8897910 | Particle beam-assisted ultra-precision machining method for single-crystal brittle materials | Yunhui Chen, Zongwei Xu, Zhongjun Qiu, Xiaodong Zhang, Tengfei Dai +1 more | 2014-11-25 |