| 5191393 |
Optical measurement device and method |
Olivier Hignette |
1993-03-02 |
| 4402610 |
Optical system for the automatic alignment of two motifs comprising alignment marks of the grating type, particularly in direct photorepetition on silicon |
— |
1983-09-06 |
| 4375315 |
Arc lamp illuminator |
Georges Dubroeucq |
1983-03-01 |
| 4373774 |
Illuminator for supplying a divergent illuminating beam from a predetermined area of a plane |
Georges Dubroeucq, Michele Brevignon |
1983-02-15 |
| 4373814 |
Compact optical coupling device and optical-fiber interferometer gyrometer comprising such a device |
Georges Pircher, Herve Lefevre |
1983-02-15 |
| 4371264 |
Optical system for aligning two patterns and photo-repeater using such a system |
Georges Dubroeucq |
1983-02-01 |
| 4370026 |
Illuminating device for providing an illumination beam with adjustable distribution of intensity and a pattern-transfer system comprising such a device |
Georges Dubroeucq, Michele Brevignon |
1983-01-25 |
| 4367046 |
Optical system for aligning two patterns and a photorepeater embodying such a system |
— |
1983-01-04 |
| 4329056 |
Optical fiber interferometric rate gyro particularly adapted to the measurement of low rotational speeds |
Herve Lefevre |
1982-05-11 |
| 4295735 |
Optical projection system having a photorepetition function |
Andre Gerard |
1981-10-20 |
| 4239381 |
Optical projection system equipped with a plate positioner |
Jean C. Graffin, Robert Antoine |
1980-12-16 |
| 4226569 |
Wafer loading and positioning device |
Rene Gerard |
1980-10-07 |
| 4221487 |
System for testing a pattern recorded on a plate |
Serge Volmier-Desperques |
1980-09-09 |