Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4934767 | Semiconductor wafer carrier input/output drawer | Hazen L. Hoyt, III, William R. Mello | 1990-06-19 |
| 4817557 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | Michael Diem, Michael A. Fisk | 1989-04-04 |
| 4726961 | Process for low pressure chemical vapor deposition of refractory metal | Michael Diem, Michael A. Fisk | 1988-02-23 |
| 4722659 | Semiconductor wafer carrier transport apparatus | Hazen L. Hoyt, III, John D. Sanders, William R. Mello | 1988-02-02 |
| 4619840 | Process and apparatus for low pressure chemical vapor deposition of refractory metal | Michael A. Fisk, Michael Diem | 1986-10-28 |
| 4557950 | Process for deposition of borophosphosilicate glass | Thomas C. Foster, Gary W. Hoeye | 1985-12-10 |
| 4376796 | Processing silicon wafers employing processing gas atmospheres of similar molecular weight | Robert D. Arrasmith, Thomas R. Barnhart | 1983-03-15 |
| 4369031 | Gas control system for chemical vapor deposition system | Robert E. Rappaport | 1983-01-18 |
| 4279947 | Deposition of silicon nitride | Larry D. McMillan, James Bradley Price | 1981-07-21 |