Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5131752 | Method for film thickness endpoint control | Kenneth H. Isaak | 1992-07-21 |
| 4886954 | Hot wall diffusion furnace and method for operating the furnace | Michael A. Fisk, Alan Emami | 1989-12-12 |
| 4711989 | Diffusion furnace multizone temperature control | — | 1987-12-08 |