Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4816361 | Patterning optical and X-ray masks for integrated circuit fabrication | — | 1989-03-28 |
| 4797334 | Patterning optical and X-ray masks for integrated circuit fabrication | — | 1989-01-10 |
| 4761560 | Measurement of proximity effects in electron beam lithography | — | 1988-08-02 |
| 4610948 | Electron beam peripheral patterning of integrated circuits | — | 1986-09-09 |
| 4194187 | Analog-to-digital conversion by charge coupled device | — | 1980-03-18 |