Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5870186 | Detector for particle surface contamination | Paul A. Mogan, Carl B. Mattson | 1999-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5870186 | Detector for particle surface contamination | Paul A. Mogan, Carl B. Mattson | 1999-02-09 |