Issued Patents All Time
Showing 51–75 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7399359 | Method and system for providing a thin film with a controlled crystal orientation using pulsed laser induced melting and nucleation-initiated crystallization | Jae-Beom Choi | 2008-07-15 |
| 7364952 | Systems and methods for processing thin films | — | 2008-04-29 |
| 7341928 | System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques | — | 2008-03-11 |
| 7318866 | Systems and methods for inducing crystallization of thin films using multiple optical paths | — | 2008-01-15 |
| 7319056 | Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification | Robert S. Sposili, Mark Albert Crowder | 2008-01-15 |
| 7311778 | Single scan irradiation for crystallization of thin films | Paul Van Der Wilt | 2007-12-25 |
| 7300858 | Laser crystallization and selective patterning using multiple beamlets | — | 2007-11-27 |
| 7259081 | Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions | — | 2007-08-21 |
| 7220660 | Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method | Robert S. Sposili, Mark Albert Crowder | 2007-05-22 |
| 7164153 | Thin film transistor array panel | Su-Gyeong Lee, Sook-Young Kang, Myung-Koo Kang, Hyun-Jae Kim | 2007-01-16 |
| 7164152 | Laser-irradiated thin films having variable thickness | — | 2007-01-16 |
| 7160763 | Polycrystalline TFT uniformity through microstructure mis-alignment | Paul Van Der Wilt | 2007-01-09 |
| 7115503 | Method and apparatus for processing thin metal layers | — | 2006-10-03 |
| 7029996 | Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification | Robert S. Sposili, Mark Albert Crowder | 2006-04-18 |
| 6961117 | Process and mask projection system for laser crystallization processing of semiconductor film regions on a substrate | — | 2005-11-01 |
| 6908835 | Method and system for providing a single-scan, continuous motion sequential lateral solidification | Robert S. Sposili | 2005-06-21 |
| 6830993 | Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method | Robert S. Sposili, Mark Albert Crowder | 2004-12-14 |
| 6635554 | Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures | Robert S. Sposili, Mark Albert Crowder | 2003-10-21 |
| 6582827 | Specialized substrates for use in sequential lateral solidification processing | — | 2003-06-24 |
| 6573531 | Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures | Robert S. Sposili, Mark Albert Crowder | 2003-06-03 |
| 6563077 | System for providing a continuous motion sequential lateral solidification | — | 2003-05-13 |
| 6555449 | Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidfication | Robert S. Sposili, Mark Albert Crowder | 2003-04-29 |
| 6368945 | Method and system for providing a continuous motion sequential lateral solidification | — | 2002-04-09 |
| 6322625 | Crystallization processing of semiconductor film regions on a substrate, and devices made therewith | — | 2001-11-27 |
| 5296089 | Enhanced radiative zone-melting recrystallization method and apparatus | Chenson K. Chen | 1994-03-22 |