Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787744 | Enhancement of thermal atomic layer etching | Steven M. George, Jaime W. DUMONT, Amy Elizabeth Marquardt, Younghee Lee, David Zywotko +1 more | 2020-09-29 |
| 10208383 | Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination | Steven M. George, Younghee Lee | 2019-02-19 |