Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10247554 | Fully balanced micro-machined inertial sensor | Doruk Senkal, Andrei M. Shkel | 2019-04-02 |
| 9696340 | Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation | Alexander A. Trusov, Andrei M. Shkel | 2017-07-04 |
| 9296133 | Method for batch fabrication of three-dimensional shells | Andrei M. Shkel, Alexander A. Trusov, Igor P. Prikhodko | 2016-03-29 |
| 9274136 | Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation | Alexander A. Trusov, Andrei M. Shkel | 2016-03-01 |
| 8991247 | High range digital angular rate sensor based on frequency modulation | Alexander A. Trusov, Andrei M. Shkel | 2015-03-31 |
| 8567247 | Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the same | Andrei M. Shkel, Alexander A. Trusov, Igor P. Prikhodko | 2013-10-29 |
| 8368154 | Three dimensional folded MEMS technology for multi-axis sensor systems | Alexander A. Trusov, Montgomery C. Rivers, Andrei M. Shkel | 2013-02-05 |