Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7534470 | Surface and composition enhancements to high aspect ratio C-MEMS | Marc J. Madou, Chunlei Wang, Benjamin Park, Rabih Bachir Zaouk | 2009-05-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7534470 | Surface and composition enhancements to high aspect ratio C-MEMS | Marc J. Madou, Chunlei Wang, Benjamin Park, Rabih Bachir Zaouk | 2009-05-19 |