Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939355 | Single-mask fabrication process for linear and angular piezoresistive accelerometers | Erik J. Eklund | 2011-05-10 |
| 7694531 | Method and apparatus for wafer-level micro-glass-blowing | E. Eklund | 2010-04-13 |
| 7421898 | Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object | Cenk Acar | 2008-09-09 |
| 7377167 | Nonresonant micromachined gyroscopes with structural mode-decoupling | Cenk Acar | 2008-05-27 |
| 7284430 | Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator | Cenk Acar | 2007-10-23 |
| 7279761 | Post-release capacitance enhancement in micromachined devices and a method of performing the same | Cenk Acar | 2007-10-09 |
| 7100446 | Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement | Cenk Acar | 2006-09-05 |
| 7040164 | Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope | Chris Painter | 2006-05-09 |
| 6934660 | Multi stage control architecture for error suppression in micromachined gyroscopes | Christopher C. Painter | 2005-08-23 |
| 6928874 | Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same | Christopher C. Painter | 2005-08-16 |
| 6845669 | Non-resonant four degrees-of-freedom micromachined gyroscope | Cenk Acar | 2005-01-25 |
| 6531332 | Surface micromachining using a thick release process | Michael J. Little | 2003-03-11 |
| 6481285 | Micro-machined angle-measuring gyroscope | Roger T. Howe | 2002-11-19 |
| 6430333 | Monolithic 2D optical switch and method of fabrication | Michael J. Little | 2002-08-06 |