Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5143018 | Apparatus for depositing uniform films by how-pressure chemical vapor deposition | — | 1992-09-01 |
| 5063086 | Vacuum deposition process and apparatus for producing films having high uniformity | — | 1991-11-05 |
| 5026574 | Chemical vapor deposition process for depositing large-grain polysilicon films | Nikolaos A. Economu | 1991-06-25 |
| 4880753 | Method of fabricating a polysilicon thin film transistor | Piero Migliorato | 1989-11-14 |