Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390020 | Dual face shower head magnetron, plasma generating apparatus and method of coating substrate | Ing-Feng Hu | 2002-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390020 | Dual face shower head magnetron, plasma generating apparatus and method of coating substrate | Ing-Feng Hu | 2002-05-21 |