Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770503 | Integrated packaging of micromechanical sensors and associated control circuits | Thomas F. Marinis, Richard P. Tumminelli | 2004-08-03 |
| 5646348 | Micromechanical sensor with a guard band electrode and fabrication technique therefor | Paul Greiff | 1997-07-08 |