Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852481 | MEMS motion sensor and method of manufacturing | Louis Ross | 2023-12-26 |
| 11674803 | Multi-mass MEMS motion sensor | Louis Ross | 2023-06-13 |
| 11579033 | MEMS pressure sensor | Louis Ross | 2023-02-14 |
| 11287486 | 3D MEMS magnetometer and associated methods | — | 2022-03-29 |
| 10768065 | MEMS pressure sensor | Louis Ross | 2020-09-08 |
| 10407299 | 3D MEMS device with hermetic cavity | — | 2019-09-10 |
| 10273147 | MEMS components and method of wafer-level manufacturing thereof | — | 2019-04-30 |
| 10214414 | Integrated MEMS system | Louis Ross | 2019-02-26 |
| 9309106 | 3D MEMS device and method of manufacturing | Louis Ross | 2016-04-12 |
| 8593036 | High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same | — | 2013-11-26 |
| 8077372 | Micro-electromechanical microshutter array | John N. Border, Herbert J. Erhardt, J. Kelly Lee, Marek W. Kowarz | 2011-12-13 |
| 7684101 | Micro-electromechanical microshutter array | John N. Border, Herbert J. Erhardt, J. Kelly Lee, Marek W. Kowarz | 2010-03-23 |
| 6346776 | Field emission array (FEA) addressed deformable light valve modulator | William P. Robinson | 2002-02-12 |
| 6061075 | Non-systolic time delay and integration printing | William E. Nelson, Paul M. Urbanus, Jeffrey B. Sampsell | 2000-05-09 |
| 5774252 | Membrane device with recessed electrodes and method of making | Tsen-Hwang Lin, Gregory A. Magel, Wen Ren Wu | 1998-06-30 |
| 5721801 | Membrane optical waveguide device and method of fabrication | — | 1998-02-24 |
| 5703728 | Support post architecture for micromechanical devices | Gregory C. Smith | 1997-12-30 |
| 5701372 | Hybrid architecture for integrated optic switchable time delay lines and method of fabricating same | Gregory A. Magel | 1997-12-23 |
| 5661591 | Optical switch having an analog beam for steering light | Tsen-Hwang Lin, Philip A. Congdon, Gregory A. Magel, James M. Florence | 1997-08-26 |
| 5631782 | Support post architecture for micromechanical devices | Gregory C. Smith | 1997-05-20 |
| 5629794 | Spatial light modulator having an analog beam for steering light | Gregory A. Magel, James M. Florence | 1997-05-13 |
| 5618759 | Methods of and apparatus for immobilizing semiconductor wafers during sawing thereof | — | 1997-04-08 |
| 5551293 | Micro-machined accelerometer array with shield plane | Jeffrey B. Sampsell | 1996-09-03 |
| 5526688 | Digital flexure beam accelerometer and method | Jeffrey B. Sampsell | 1996-06-18 |
| 5305640 | Digital flexure beam accelerometer | Jeffrey B. Sampsell | 1994-04-26 |