Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5401692 | Method for minimizing particle generation on a wafer surface during high pressure oxidation of silicon | Andrew P. Lane | 1995-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5401692 | Method for minimizing particle generation on a wafer surface during high pressure oxidation of silicon | Andrew P. Lane | 1995-03-28 |