Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7449591 | Process of removing transition metals | Kai Donsbach, Thomas Nicola, Thomas Wirth | 2008-11-11 |
| 7183374 | Method of removing transition metals | Siegfried Meineck, Thomas Wirth | 2007-02-27 |
| 7166546 | Planarization for integrated circuits | — | 2007-01-23 |
| 7071025 | Separating wafers coated with plastic films | Vincent C. Lopes | 2006-07-04 |
| 7060633 | Planarization for integrated circuits | — | 2006-06-13 |
| 6753037 | Re-coating MEMS devices using dissolved resins | Seth Miller, Vincent C. Lopes | 2004-06-22 |
| 5766369 | Method to reduce particulates in device manufacture | Toan Tran | 1998-06-16 |