Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381162 | Process for reducing pattern-induced wafer deformation | Jonas Höhenberger | 2025-08-05 |
| 11587889 | Reduced pattern-induced wafer deformation | Jonas Höhenberger | 2023-02-21 |
| 7601549 | Method of processing semiconductor wafers | Ulrich Clement | 2009-10-13 |