Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5895270 | Chemical mechanical polishing method and apparatus | — | 1999-04-20 |
| 5893753 | Vibrating polishing pad conditioning system and method | — | 1999-04-13 |
| 5851138 | Polishing pad conditioning system and method | — | 1998-12-22 |
| 5683289 | CMP polishing pad conditioning apparatus | — | 1997-11-04 |
| 5609719 | Method for performing chemical mechanical polish (CMP) of a wafer | — | 1997-03-11 |
| 5597346 | Method and apparatus for holding a semiconductor wafer during a chemical mechanical polish (CMP) process | — | 1997-01-28 |
| 5597443 | Method and system for chemical mechanical polishing of semiconductor wafer | — | 1997-01-28 |