| 5592211 |
Laser pattern/inspector with a linearly ramped chirp deflector |
Vernon R. Porter, William G. Manns, Anthony B. Wood, Jerry D. Merryman, S. Charles Baber +1 more |
1997-01-07 |
| 5046110 |
Comparator error filtering for pattern inspector |
Lori A. Carucci, William G. Manns |
1991-09-03 |
| 5027132 |
Position compensation of laser scan for stage movement |
William G. Manns, Jerry D. Merryman, Chyi N. Sheng |
1991-06-25 |
| 5018210 |
Pattern comparator with substage illumination and polygonal data representation |
Jerry D. Merryman, Thomas C. Penn, William G. Manns, Anthony B. Wood |
1991-05-21 |
| 5018212 |
Defect area consolidation for pattern inspector |
William G. Manns, Anthony B. Wood, David A. Norwood, Michael Gordon |
1991-05-21 |
| 5001764 |
Guardbands for pattern inspector |
Anthony B. Wood, William G. Manns, David A. Norwood, Chyi N. Sheng |
1991-03-19 |
| 4991977 |
Smoothing filter for stage position pulses |
William G. Manns, Anthony B. Wood, Ronald Drafz |
1991-02-12 |
| 4984282 |
Parallel processing of reference and guardband data |
William G. Manns, David A. Norwood, Chyi N. Sheng, Anthony B. Wood |
1991-01-08 |
| 4969200 |
Target autoalignment for pattern inspector or writer |
William G. Manns, Anthony B. Wood, Michael Gordon, Tom G. Hudiburgh, David A. Norwood |
1990-11-06 |