Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643952 | System and method for controlling a vapor dryer process | Neal Murphy, Daryl Ross Koehl, Donald Rigsby | 2003-11-11 |
| 6634368 | Application of ozonated DI water to scrubbers for resist strip and particle removal processes | Neal Murphy | 2003-10-21 |
| 6497055 | System and method for controlling a vapor dryer process | Neal Murphy, Daryl Ross Koehl, Donald Rigsby | 2002-12-24 |
| 6399513 | Ozonated DI water process for organic residue and metal removal processes | Neal Murphy, Danny F. Mathews | 2002-06-04 |
| 6387822 | Application of an ozonated DI water spray to resist residue removal processes | Neal Murphy, Danny F. Mathews | 2002-05-14 |