Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7550748 | Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam | Steve Caliendo | 2009-06-23 |
| 7550749 | Methods and processing systems for using a gas cluster ion beam to offset systematic non-uniformities in workpieces processed in a process tool | Steve Caliendo | 2009-06-23 |