Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732041 | Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer | Heikki Saari, Bin Guo | 2020-08-04 |
| 10088362 | Mirror plate for an optical interferometer and an optical interferometer | Aapo Varpula, Christer Holmlund | 2018-10-02 |
| 9268144 | Method for producing a mirror plate for Fabry-Perot interferometer, and a mirror plate produced by the method | Jarkko Antila | 2016-02-23 |