Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5832746 | Ultra-high purity nitrogen trifluoride production method, and unit therefor | — | 1998-11-10 |
| 5783162 | Argon purification process | Shinji Tomita, Takao Yamamoto | 1998-07-21 |
| 5685169 | Method and apparatus for preparing high purity hydrogen bromide | Shinji Tomita | 1997-11-11 |
| 5682761 | Ultra-high purity nitrogen generating method and unit | Takao Yamamoto, Shinji Tomita | 1997-11-04 |
| 5617740 | Method of producing ultra high purity monosilane and apparatus therefor | Shinji Tomita | 1997-04-08 |
| 5546765 | Air separating unit | Shinji Tomita | 1996-08-20 |
| 5499506 | Ultra-high purity monosilane producing process and unit | Shinji Tomita | 1996-03-19 |
| 5478547 | Ultra-high purity nitrogen generating method | Takao Yamamoto, Shinji Tomita | 1995-12-26 |
| 5470543 | Ultra-high purity nitrogen generator | Takao Yamamoto, Shinji Tomita | 1995-11-28 |
| 5441719 | Ultra-high purity nitrogen generating method | Takao Yamamoto, Shinji Tomita | 1995-08-15 |
| 5363656 | Ultra-high purity nitrogen and oxygen generator | Takao Yamamoto | 1994-11-15 |
| 5349822 | Method and apparatus for the production of ultra-high purity nitrogen | Takao Yamamoto | 1994-09-27 |
| 5345773 | Method and apparatus for the production of ultra-high purity nitrogen | Takao Yamamoto | 1994-09-13 |
| 5220798 | Air separating method using external cold source | Naohiko Yamashita | 1993-06-22 |