Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8808513 | Stress adjustment in reactive sputtering | Valery Felmetsger | 2014-08-19 |
| 8691057 | Stress adjustment in reactive sputtering | Valery Felmetsger | 2014-04-08 |
| 7467598 | System for, and method of, etching a surface on a wafer | — | 2008-12-23 |
| 7270729 | System for, and method of, etching a surface on a wafer | — | 2007-09-18 |
| 7179350 | Reactive sputtering of silicon nitride films by RF supported DC magnetron | Valery Felmetsger | 2007-02-20 |