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Dry heat diffusion cell and diffusion sampling system |
Steven W. Shaw |
2020-08-25 |
| 9797875 |
Automated filter changer |
Steven W. Shaw |
2017-10-24 |
| 6558750 |
Method of processing and plating planar articles |
Daniel J. Gramarossa |
2003-05-06 |
| 6524463 |
Method of processing wafers and other planar articles within a processing cell |
Daniel J. Gramarossa |
2003-02-25 |
| 6419805 |
Apparatus for plating wafers, substrates and other articles |
Robert Kaufman |
2002-07-16 |
| 6361669 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman |
2002-03-26 |
| 6322313 |
Apparatus and method for inserting a wafer, substrate or other article into a process module |
Robert Kaufman |
2001-11-27 |
| 6299751 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman |
2001-10-09 |
| 6296753 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman, Daniel J. Gramarossa |
2001-10-02 |
| 6287443 |
Apparatus and method for electroplating wafers, substrates and other articles |
Robert Kaufman, Daniel J. Gramarossa |
2001-09-11 |
| 6277260 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman |
2001-08-21 |
| 6274024 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman |
2001-08-14 |
| 6274023 |
Apparatus and method for electroplating wafers, substrates and other articles |
Robert Kaufman |
2001-08-14 |
| 6267862 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman |
2001-07-31 |
| 6251238 |
Anode having separately excitable sections to compensate for non-uniform plating deposition across the surface of a wafer due to seed layer resistance |
Robert Kaufman |
2001-06-26 |
| 6197182 |
Apparatus and method for plating wafers, substrates and other articles |
Robert Kaufman, Daniel J. Gramarossa |
2001-03-06 |