Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7121927 | Retaining ring structure for edge control during chemical-mechanical polishing | Jianguang Chang | 2006-10-17 |
| 7029375 | Retaining ring structure for edge control during chemical-mechanical polishing | Jianguang Chang | 2006-04-18 |
| 6893983 | Method for depositing a very high phosphorus doped silicon oxide film | Jian Sun, Hing Ho Au | 2005-05-17 |