Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753437 | CVD material compound and method for manufacturing the same, and CVD method of iridium or iridium compound thin film | Takeyuki Sagae | 2004-06-22 |
| 6476247 | Processes for the preparation of organoluthenium compounds useful for thin film formation by CVD | Koji Okamoto, Masayuki Saito | 2002-11-05 |