| 5937993 |
Apparatus and method for automatically handling and holding panels near and at the exact plane of exposure |
Robert G. Heitel |
1999-08-17 |
| 5559629 |
Unit magnification projection system and method |
Yanrong Yuan |
1996-09-24 |
| 5530516 |
Large-area projection exposure system |
— |
1996-06-25 |
| 4940881 |
Method and apparatus for effecting selective ablation of a coating from a substrate, and controlling the wall angle of coating edge portions |
— |
1990-07-10 |
| 4698486 |
Method of heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc. |
— |
1987-10-06 |
| 4649261 |
Apparatus for heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc. |
— |
1987-03-10 |
| 4555630 |
Automatic system for exposing and handling double-sided printed circuit boards |
George A. Barbas, Howard W. Doering, Jr., John Bjorkman |
1985-11-26 |
| 4539479 |
Automatic apparatus and method for exposing, registering, and handling double-sided printed circuit boards |
George A. Barbas, Howard W. Doering, Jr., John Bjorkman |
1985-09-03 |
| D272914 |
Wide field illuminator |
— |
1984-03-06 |