Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11666950 | Method of forming process film | Tsung-Lin Lee, Yi-Ming Lin, Chih-hung Yeh | 2023-06-06 |
| 10668511 | Method of cleaning process chamber | Tsung-Lin Lee, Yi-Ming Lin, Chih-hung Yeh | 2020-06-02 |