Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334365 | Exhaust piping for a semiconductor processing tool | Kuo-Sheng LIEN | 2025-06-17 |
| 11551958 | Apparatus and method for transferring wafers | Chung-Hsung Yang | 2023-01-10 |
| 11551959 | System and method for automated wafer carrier handling | Chung-Hsung Yang | 2023-01-10 |
| 10043650 | Method and system for wet chemical bath process | — | 2018-08-07 |
| 9772563 | Method and structure for automated inert gas charging in a reticle stocker | Wen-Chieh Tsou, Chih-Wei Huang, Wei Wang | 2017-09-26 |
| 9020633 | Automating storage, retrieval, and routine for process flow | Chun-Jung Huang | 2015-04-28 |
| 8492283 | Method and structure for automated inert gas charging in a reticle stocker | Wen-Chieh Tsou, Chih-Wei Huang, Wei Wang | 2013-07-23 |
| 7679722 | Reticle management systems and methods | Ping-Yung Yen | 2010-03-16 |