Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790124 | Methods for removing particles from etching chamber | Yu-Chao Lin, Ming-Ching Chang, Hsin-Yi Tsai, Chao-Cheng Chen | 2020-09-29 |
| 9934945 | Methods for removing particles from etching chamber | Yu-Chao Lin, Ming-Ching Chang, Hsin-Yi Tsai, Chao-Cheng Chen | 2018-04-03 |