Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998219 | Wafer support device and method for removing lift pin therefrom | Zong-Han Hu, Chen Liang Chang, Chin-Szu Lee | 2021-05-04 |
| 10879049 | Chemical vapor deposition tool and operating method thereof | Chien-Ta Lee, Pen-Li Hung | 2020-12-29 |