Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563154 | Polysilicon layer having improved roughness after POCl3 doping | Chun-Chieh Chang, Te-Fu Tseng, Chao-Yi Lan | 2003-05-13 |
| 5961725 | Conical baffle for semiconductor furnaces | Ying-Lang Wang | 1999-10-05 |
| 5874333 | Process for forming a polysilicon layer having improved roughness after POCL3 doping | Chun-Chieh Chang, Te-Fu Tseng, Chao-Yi Lan | 1999-02-23 |
| 5838716 | Leak check procedure for a dry oxidation furnace tube | Hui-Hua Chang, Chi-Fu Ni | 1998-11-17 |
| 5792701 | Conical baffle for semiconductor furnaces | Ying-Lang Wang | 1998-08-11 |