Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843926 | In-situ measurement of wafer position on lower electrode | Cheng-Yi Chang, Shih-Shun Chen | 2005-01-18 |
YL
Yu-Chih Lai
Overall (All Time): #3,439,112 of 4,157,543Top 85%
1
Patents All Time