Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11237478 | Cleaning module, cleaning apparatus and method of cleaning photomask | Kun-Lung Hsieh | 2022-02-01 |
| 10747105 | Cleaning module, cleaning apparatus and method of cleaning photomask | Kun-Lung Hsieh | 2020-08-18 |
| 9857680 | Cleaning module, cleaning apparatus and method of cleaning photomask | Kun-Lung Hsieh | 2018-01-02 |