Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374530 | Semiconductor processing apparatus for generating plasma | Chien-Hsiang Chen, Ching-Horng Chen, Cheng-Yi Huang, Chih-Shen Yang | 2025-07-29 |
| 11854841 | Space filling device for wet bench | Chih-Shen Yang, Cheng-Yi Huang | 2023-12-26 |
| 11482430 | Space filling device for wet bench | Chih-Shen Yang, Cheng-Yi Huang | 2022-10-25 |
| 11348818 | Slit door assembly and method of operating the same | Jer-Shien Yang, Chien-Hung Lin, Pei-Sheng Lin | 2022-05-31 |