Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120986 | Etching using chamber with top plate formed of non-oxygen containing material | En-Ping Lin, Yi-Wei Chiu, Tzu-Chan Weng | 2021-09-14 |
| 10504720 | Etching using chamber with top plate formed of non-oxygen containing material | En-Ping Lin, Yi-Wei Chiu, Tzu-Chan Weng | 2019-12-10 |
| 10269938 | Semiconductor device structure having a doped passivation layer | Chi-Chin Hsu, Yi-Wei Chiu, Tzu-Chan Weng | 2019-04-23 |