Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399067 | Apparatus, system, and method for measuring the temperature of a substrate | Yi-Chao Wang, Wen-Yen Chen, Li-Ting Wang, Huicheng Chang, Yee-Chia Yeo | 2025-08-26 |
| 12074026 | Integrated photoresist removal and laser annealing | Li-Ting Wang, Yee-Chia Yeo | 2024-08-27 |
| 11532516 | Melting laser anneal of epitaxy regions | Su-Hao Liu, Wen-Yen Chen, Cheng-Jung Sung, Li-Ting Wang, Liang-Yin Chen +3 more | 2022-12-20 |
| 10978344 | Melting laser anneal of epitaxy regions | Su-Hao Liu, Wen-Yen Chen, Cheng-Jung Sung, Li-Ting Wang, Liang-Yin Chen +3 more | 2021-04-13 |